By automatically monitoring the flatness and horizontal shift of the probe card, D-sensor can determine whether to issue a warning and prevent test anomalies accordingly.
Specification
Platform
Advantest V93k
Measuring range
3,000µm
Resolution
<0.5µm(Static)
Z-axis
Measure the distance between probe card and bridge beam to monitor the levelness during testing.
Cooperated with Advantest Taiwan Inc. for real-time force monitoring and alarm system.
Y-axis
Monitor probe card stiffener offset to predict potential probe mark offset.
Cooperated with Advantest Taiwan Inc. for alarm system.