Products & Service

D-Sensor Bridge Beam

By automatically monitoring the flatness and horizontal shift of the probe card, D-sensor can determine whether to issue a warning and prevent test anomalies accordingly.

Specification

Platform

Advantest V93k

Measuring range

3,000µm

Resolution

<0.5µm(Static)

Z-axis

  1. Measure the distance between probe card and bridge beam to monitor the levelness during testing.
  2. Cooperated with Advantest Taiwan Inc. for real-time force monitoring and alarm system.

Y-axis

  1. Monitor probe card stiffener offset to predict potential probe mark offset.
  2. Cooperated with Advantest Taiwan Inc. for alarm system.
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